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"Registration Mark Detection for Electron-Beam Lithography - EL1 System."

Donald E. Davis (1980)

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DOI: 10.1147/RD.245.0545

access: closed

type: Journal Article

metadata version: 2020-05-12

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Donald E. Davis:
Registration Mark Detection for Electron-Beam Lithography - EL1 System. IBM J. Res. Dev. 24(5): 545-553 (1980)

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