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"Nitrided gate oxides for 3.3-V logic application: Reliability and device ..."

Terence B. Hook, Jay S. Burnham, Ronald J. Bolam (1999)

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DOI: 10.1147/RD.433.0393

access: closed

type: Journal Article

metadata version: 2020-03-13

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Terence B. Hook, Jay S. Burnham, Ronald J. Bolam:
Nitrided gate oxides for 3.3-V logic application: Reliability and device design considerations. IBM J. Res. Dev. 43(3): 393-406 (1999)

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