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"Synchrotron X-ray scattering techniques for microelectronics-related ..."

Jean L. Jordan-Sweet (2000)

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DOI: 10.1147/RD.444.0457

access: closed

type: Journal Article

metadata version: 2020-03-13

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Jean L. Jordan-Sweet:
Synchrotron X-ray scattering techniques for microelectronics-related materials studies. IBM J. Res. Dev. 44(4): 457-476 (2000)

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