"Proximity Effects in Electron Lithography: Magnitude and Correction ..."

Mihir Parikh (1980)

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DOI: 10.1147/RD.244.0438

access: closed

type: Journal Article

metadata version: 2020-05-12

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Mihir Parikh:
Proximity Effects in Electron Lithography: Magnitude and Correction Techniques. IBM J. Res. Dev. 24(4): 438-451 (1980)

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