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"Self-assembly technique for MEMS vertical comb electrostatic actuator."
Keiji Isamoto et al. (2005)
- Keiji Isamoto, T. Makino, A. Moroswa, Chongho Chong, Hiroyuki Fujita, Hiroshi Toshiyoshi:
Self-assembly technique for MEMS vertical comb electrostatic actuator. IEICE Electron. Express 2(9): 311-315 (2005)
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