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"Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide ..."
Takuji Ikemoto, Yasuo Kokubun (2007)
- Takuji Ikemoto, Yasuo Kokubun:
Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide MEMS Switch Based on Microfluidics. IEICE Trans. Electron. 90-C(1): 78-86 (2007)
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