"Gate-Extension Overlap Control by Sb Tilt Implantation."

Kentaro Shibahara, Nobuhide Maeda (2007)

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DOI: 10.1093/IETELE/E90-C.5.973

access: closed

type: Journal Article

metadata version: 2020-04-11

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Kentaro Shibahara, Nobuhide Maeda:
Gate-Extension Overlap Control by Sb Tilt Implantation. IEICE Trans. Electron. 90-C(5): 973-977 (2007)

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