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"Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm ..."
Thitipat Permpatdechakul et al. (2024)
- Thitipat Permpatdechakul
, Panart Khajornrungruang
, Keisuke Suzuki, Aran Blattler
, Jiraphan Inthiam:
Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field. Int. J. Autom. Technol. 18(1): 47-57 (2024)
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