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"Gap Optimisation For Proximity X-Ray Lithography Using The ..."
Jong Ren Kong, Oliver Wilhelmi, Herbert O. Moser (2003)
- Jong Ren Kong, Oliver Wilhelmi, Herbert O. Moser:
Gap Optimisation For Proximity X-Ray Lithography Using The Super-Resolution Process. Int. J. Comput. Eng. Sci. 4(3): 585-588 (2003)
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