"Discrete relaxation method for contact layer decomposition of DSA with ..."

Xingquan Li, Jianli Chen, Wenxing Zhu (2018)

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DOI: 10.1016/J.VLSI.2017.11.004

access: closed

type: Journal Article

metadata version: 2024-05-07

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Xingquan Li, Jianli Chen, Wenxing Zhu:
Discrete relaxation method for contact layer decomposition of DSA with triple patterning. Integr. 61: 77-87 (2018)

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