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ORCID"Recurrent feature-incorporated convolutional neural network for virtual ..."
Ki Bum Lee, Chang Ouk Kim (2020)
- Ki Bum Lee
, Chang Ouk Kim:
Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process. J. Intell. Manuf. 31(1): 73-86 (2020)
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