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"Hierarchical indices to detect equipment condition changes with high ..."

Hui-Chun Yu, Kuo-Yi Lin, Chen-Fu Chien (2014)

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DOI: 10.1007/S10845-013-0785-3

access: closed

type: Journal Article

metadata version: 2022-10-04

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Hui-Chun Yu, Kuo-Yi Lin, Chen-Fu Chien:
Hierarchical indices to detect equipment condition changes with high dimensional data for semiconductor manufacturing. J. Intell. Manuf. 25(5): 933-943 (2014)

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