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"Yaw error correction of ultra-precision stage for scanning beam ..."

Sen Lu et al. (2018)

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DOI: 10.1177/0959651818766197

access: closed

type: Journal Article

metadata version: 2020-09-18

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  - https://dblp.org/rec/journals/jsce/LuYZWZY18
Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang, Jin Yang:
Yaw error correction of ultra-precision stage for scanning beam interference lithography systems. J. Syst. Control. Eng. 232(7): 869-878 (2018)

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