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"Fabrication and Measurement of a Suspended Nanochannel Microbridge ..."

Gabriel Vidal-Álvarez et al. (2016)

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DOI: 10.3390/MI7030040

access: open

type: Journal Article

metadata version: 2019-06-02

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  dblp key:
  - journals/micromachines/Vidal-AlvarezM016
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  persistent URL:
  - https://dblp.org/rec/journals/micromachines/Vidal-AlvarezM016
Gabriel Vidal-Álvarez, Eloi Marigó, Francesc Torres, Núria Barniol:
Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry. Micromachines 7(3): 40 (2016)

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