"Plasmonic Structures, Materials and Lenses for Optical Lithography beyond ..."

Changtao Wang et al. (2016)

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DOI: 10.3390/MI7070118

access: open

type: Journal Article

metadata version: 2020-05-30

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  - journals/micromachines/WangZZWGLL16
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  - https://dblp.org/rec/journals/micromachines/WangZZWGLL16
Changtao Wang, Wei Zhang, Zeyu Zhao, Yanqin Wang, Ping Gao, Yunfei Luo, Xiangang Luo:
Plasmonic Structures, Materials and Lenses for Optical Lithography beyond the Diffraction Limit: A Review. Micromachines 7(7): 118 (2016)

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