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"Defocusing image to pattern contact holes using attenuated phase shift masks."

Navab Singh, Moitreyee Mukherjee-Roy, Sohan Singh Mehta (2003)

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DOI: 10.1016/S0026-2692(03)00005-3

access: closed

type: Journal Article

metadata version: 2020-02-22

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Navab Singh, Moitreyee Mukherjee-Roy, Sohan Singh Mehta:
Defocusing image to pattern contact holes using attenuated phase shift masks. Microelectron. J. 34(4): 237-245 (2003)

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