"Comparing bulk-Si FinFET and gate-all-around FETs for the 5 nm ..."

Vinay Vashishtha, Lawrence T. Clark (2021)

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DOI: 10.1016/J.MEJO.2020.104942

access: closed

type: Journal Article

metadata version: 2021-09-16

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Vinay Vashishtha, Lawrence T. Clark:
Comparing bulk-Si FinFET and gate-all-around FETs for the 5 nm technology node. Microelectron. J. 107: 104942 (2021)

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