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"Micro cantilever probe array integrated with Piezoresistive sensor."

Zunxian Yang et al. (2004)

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DOI: 10.1016/J.MEJO.2003.12.001

access: closed

type: Journal Article

metadata version: 2023-09-30

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Zunxian Yang, Xinxin Li, Yuelin Wang, Haifei Bao, Min Liu:
Micro cantilever probe array integrated with Piezoresistive sensor. Microelectron. J. 35(5): 479-483 (2004)

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