BibTeX record journals/mj/ZhaoSKTAM05

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@article{DBLP:journals/mj/ZhaoSKTAM05,
  author    = {Xiu{-}Tian Zhao and
               Kenji Sakka and
               Naoto Kihara and
               Yasuyuki Takada and
               Makoto Arita and
               Masataka Masuda},
  title     = {Structure and photo-induced features of TiO\({}_{\mbox{2}}\) thin
               films prepared by {RF} magnetron sputtering},
  journal   = {Microelectron. J.},
  volume    = {36},
  number    = {3-6},
  pages     = {549--551},
  year      = {2005},
  url       = {https://doi.org/10.1016/j.mejo.2005.02.094},
  doi       = {10.1016/j.mejo.2005.02.094},
  timestamp = {Sat, 22 Feb 2020 19:34:09 +0100},
  biburl    = {https://dblp.org/rec/journals/mj/ZhaoSKTAM05.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}