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"Development of a permittivity extraction method for ultra low k ..."

Olga Cueto et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.057

access: closed

type: Journal Article

metadata version: 2022-11-04

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Olga Cueto, Myriam Assous, François de Crecy, A. Toffoli, David Bouchu, M. Fayolle, Frédéric Boulanger:
Development of a permittivity extraction method for ultra low k dielectrics integrated in advanced interconnects. Microelectron. Reliab. 47(4-5): 769-772 (2007)

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