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"W doping effect on the dielectric properties of amorphous ..."

A. A. Dakhel (2012)

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DOI: 10.1016/J.MICROREL.2011.12.033

access: closed

type: Journal Article

metadata version: 2020-02-22

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A. A. Dakhel:
W doping effect on the dielectric properties of amorphous Ga₂O₃ films grown on Si substrate for low-k applications. Microelectron. Reliab. 52(6): 1050-1054 (2012)

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