"Electrical properties in low temperature range (5K-300K) of Tantalum Oxide ..."

Emilie Deloffre et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.11.024

access: closed

type: Journal Article

metadata version: 2020-02-22

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Emilie Deloffre, L. Montès, Gérard Ghibaudo, Sylvie Bruyère, Serge Blonkowski, Stéphane Bécu, Mickael Gros-Jean, Sébastien Crémer:
Electrical properties in low temperature range (5K-300K) of Tantalum Oxide dielectric MIM capacitors. Microelectron. Reliab. 45(5-6): 925-928 (2005)

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