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"Synthesis of scanning electron microscopy images by high performance ..."

Aniello Esposito, Mauro Ciappa, Wolfgang Fichtner (2011)

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DOI: 10.1016/J.MICROREL.2011.07.015

access: closed

type: Journal Article

metadata version: 2020-02-22

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Aniello Esposito, Mauro Ciappa, Wolfgang Fichtner:
Synthesis of scanning electron microscopy images by high performance computing for the metrology of advanced CMOS processes. Microelectron. Reliab. 51(9-11): 1673-1678 (2011)

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