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"Influence of the surrounding ambient on the reliability of the electrical ..."

W. Hourani et al. (2011)

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DOI: 10.1016/J.MICROREL.2011.07.035

access: closed

type: Journal Article

metadata version: 2020-02-22

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W. Hourani, B. Gautier, Liviu Militaru, D. Albertini, A. Descamps-Mandine, R. Arinero:
Influence of the surrounding ambient on the reliability of the electrical characterization of thin oxide layers using an atomic force microscope. Microelectron. Reliab. 51(12): 2097-2101 (2011)

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