"Carbon-related defects in microelectronics."

Vladimir Kolkovsky, Ronald Stübner, Jörg Weber (2017)

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DOI: 10.1016/J.MICROREL.2017.06.066

access: closed

type: Journal Article

metadata version: 2020-10-09

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Vladimir Kolkovsky, Ronald Stübner, Jörg Weber:
Carbon-related defects in microelectronics. Microelectron. Reliab. 76-77: 145-148 (2017)

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