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"Temperature accelerated discharging processes through the bulk of PECVD ..."

Matroni Koutsoureli, N. Siannas, George J. Papaioannou (2017)

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DOI: 10.1016/J.MICROREL.2017.07.018

access: closed

type: Journal Article

metadata version: 2022-10-02

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Matroni Koutsoureli, N. Siannas, George J. Papaioannou:
Temperature accelerated discharging processes through the bulk of PECVD silicon nitride films for MEMS capacitive switches. Microelectron. Reliab. 76-77: 631-634 (2017)

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