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"Multiscale simulation of aluminum thin films for the design of ..."
Haruka Kubo et al. (2009)
- Haruka Kubo, Mauro Ciappa, Takayuki Masunaga, Wolfgang Fichtner:
Multiscale simulation of aluminum thin films for the design of highly-reliable MEMS devices. Microelectron. Reliab. 49(9-11): 1278-1282 (2009)
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