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"In situ steam generation (ISSG) versus standard steam technology: impact ..."

M. Langenbuch et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.10.026

access: closed

type: Journal Article

metadata version: 2024-01-16

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M. Langenbuch, R. Bottini, Maria Elena Vitali, G. Ghidini:
In situ steam generation (ISSG) versus standard steam technology: impact on oxide reliability. Microelectron. Reliab. 45(5-6): 875-878 (2005)

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