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"The role of a tensile stress bias for a sensitive silicon mechanical ..."
W. S. Lau et al. (2012)
- W. S. Lau, Peizhen Yang, S. Y. Siah, L. Chan:
The role of a tensile stress bias for a sensitive silicon mechanical stress sensor based on a change in gate-induced-drain leakage current. Microelectron. Reliab. 52(11): 2847-2850 (2012)
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