"A reliable course of Scanning Capacitance Microscopy analysis applied for ..."

Markus Leicht et al. (2001)

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DOI: 10.1016/S0026-2714(01)00164-0

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type: Journal Article

metadata version: 2025-01-19

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Markus Leicht, G. Fritzer, B. Basnar, S. Golka, Jürgen Smoliner:
A reliable course of Scanning Capacitance Microscopy analysis applied for 2D-Dopant Profilings of Power MOSFET Devices. Microelectron. Reliab. 41(9-10): 1535-1537 (2001)

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