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"Electrical characteristics and reliability properties of ..."

Chuan-Hsi Liu, H. W. Chen (2010)

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DOI: 10.1016/J.MICROREL.2010.01.014

access: closed

type: Journal Article

metadata version: 2022-08-29

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Chuan-Hsi Liu, H. W. Chen:
Electrical characteristics and reliability properties of metal-oxide-semiconductor capacitors with HfZrLaO gate dielectrics. Microelectron. Reliab. 50(5): 599-602 (2010)

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