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"Time dependent dielectric breakdown in a low-k interlevel dielectric."

J. R. Lloyd, E. Liniger, S. T. Chen (2004)

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DOI: 10.1016/J.MICROREL.2004.07.098

access: closed

type: Journal Article

metadata version: 2020-02-22

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J. R. Lloyd, E. Liniger, S. T. Chen:
Time dependent dielectric breakdown in a low-k interlevel dielectric. Microelectron. Reliab. 44(9-11): 1861-1865 (2004)

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