"Localization and physical analysis of dielectric weaknesses for ..."

Gerald Neumann, J. Touzel, Rainer Duschl (2005)

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DOI: 10.1016/J.MICROREL.2005.07.056

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type: Journal Article

metadata version: 2020-07-31

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Gerald Neumann, J. Touzel, Rainer Duschl:
Localization and physical analysis of dielectric weaknesses for state-of-the-art deep trench based DRAM products. Microelectron. Reliab. 45(9-11): 1520-1525 (2005)

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