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"The sensitivity of radiation-induced leakage to STI topology and sidewall ..."

Nadia Rezzak et al. (2011)

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DOI: 10.1016/J.MICROREL.2010.12.013

access: closed

type: Journal Article

metadata version: 2020-02-22

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Nadia Rezzak, Michael L. Alles, Ronald D. Schrimpf, Sarah Kalemeris, Lloyd W. Massengill, John Sochacki, Hugh J. Barnaby:
The sensitivity of radiation-induced leakage to STI topology and sidewall doping. Microelectron. Reliab. 51(5): 889-894 (2011)

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