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"New trends in the application of Scanning Probe Techniques in Failure ..."

Thomas Schweinböck et al. (2004)

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DOI: 10.1016/J.MICROREL.2004.07.037

access: closed

type: Journal Article

metadata version: 2022-12-07

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Thomas Schweinböck, S. Schömann, D. Álvarez, Marco Buzzo, Werner Frammelsberger, Peter Breitschopf, Günther Benstetter:
New trends in the application of Scanning Probe Techniques in Failure Analysis. Microelectron. Reliab. 44(9-11): 1541-1546 (2004)

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