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"Optimization of low temperature silicon nitride processes for improvement ..."

E. Sleeckx et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.10.028

access: closed

type: Journal Article

metadata version: 2024-03-13

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E. Sleeckx, Marc Schaekers, X. Shi, E. Kunnen, B. Degroote, M. Jurczak, Muriel de Potter de ten Broeck, E. Augendre:
Optimization of low temperature silicon nitride processes for improvement of device performance. Microelectron. Reliab. 45(5-6): 865-868 (2005)

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