BibTeX record journals/mr/SleeckxSSKDJBA05

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  author    = {E. Sleeckx and
               Marc Schaekers and
               X. Shi and
               E. Kunnen and
               B. Degroote and
               M. Jurczak and
               M. de Potter de ten Broeck and
               E. Augendre},
  title     = {Optimization of low temperature silicon nitride processes for improvement
               of device performance},
  journal   = {Microelectron. Reliab.},
  volume    = {45},
  number    = {5-6},
  pages     = {865--868},
  year      = {2005}
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