BibTeX record journals/mr/WangTGVSWWW11

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@article{DBLP:journals/mr/WangTGVSWWW11,
  author    = {Bo Wang and
               Shuji Tanaka and
               B. Guo and
               G. Vereecke and
               Simone Severi and
               Ann Witvrouw and
               Martine Wevers and
               Ingrid De Wolf},
  title     = {Outgassing study of thin films used for poly-SiGe based vacuum packaging
               of {MEMS}},
  journal   = {Microelectron. Reliab.},
  volume    = {51},
  number    = {9-11},
  pages     = {1878--1881},
  year      = {2011},
  url       = {https://doi.org/10.1016/j.microrel.2011.06.022},
  doi       = {10.1016/j.microrel.2011.06.022},
  timestamp = {Tue, 22 Dec 2020 09:47:50 +0100},
  biburl    = {https://dblp.org/rec/journals/mr/WangTGVSWWW11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}