"Thermal and voltage instabilities of hafnium oxide films prepared by ..."

Hei Wong, B. L. Yang, Shurong Dong (2013)

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DOI: 10.1016/J.MICROREL.2013.06.006

access: closed

type: Journal Article

metadata version: 2020-02-22

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Hei Wong, B. L. Yang, Shurong Dong:
Thermal and voltage instabilities of hafnium oxide films prepared by sputtering technique. Microelectron. Reliab. 53(12): 1863-1867 (2013)

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