"Application of laser deprocessing technique in PFA on chemical over-etched ..."

Huei Hao Yap et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.057

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type: Journal Article

metadata version: 2024-06-10

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Huei Hao Yap, Pik Kee Tan, Lei Zhu, H. Feng, Yuzhe Zhao, Ran He, Hao Tan, B. Liu, Y. M. Huang, D. D. Wang, Jeffrey Lam, Zhihong Mai:
Application of laser deprocessing technique in PFA on chemical over-etched on bond-pad issue. Microelectron. Reliab. 64: 357-361 (2016)

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