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"Improving reliability of poly-Si TFTs with channel layer and gate oxide ..."
Xiangbin Zeng et al. (2004)
- Xiangbin Zeng, X. W. Sun, Junfeng Li, Johnny K. O. Sin:
Improving reliability of poly-Si TFTs with channel layer and gate oxide passivated by NH3/N2O plasma. Microelectron. Reliab. 44(3): 435-442 (2004)
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