"A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology."

Chi-Feng Chen, Chih-Hsiung Shen, Yun-Ying Yeh (2021)

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DOI: 10.3390/S21010180

access: open

type: Journal Article

metadata version: 2021-06-01

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Chi-Feng Chen, Chih-Hsiung Shen, Yun-Ying Yeh:
A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology. Sensors 21(1): 180 (2021)

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