"An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer."

Deyong Chen et al. (2009)

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DOI: 10.3390/S90301330

access: open

type: Journal Article

metadata version: 2023-10-23

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Deyong Chen, Zhengwei Wu, Lei Liu, Xiaojing Shi, Junbo Wang:
An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer. Sensors 9(3): 1330-1338 (2009)

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