"Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated ..."

Lado Filipovic, Siegfried Selberherr (2015)

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DOI: 10.3390/S150407206

access: open

type: Journal Article

metadata version: 2018-11-30

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Lado Filipovic, Siegfried Selberherr:
Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors. Sensors 15(4): 7206-7227 (2015)

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