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"Accurate Simulation of Parametrically Excited Micromirrors via Direct ..."

Attilio Frangi, Andrea Guerrieri, Nicoló Boni (2017)

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DOI: 10.3390/S17040779

access: open

type: Journal Article

metadata version: 2018-11-14

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Attilio Frangi, Andrea Guerrieri, Nicoló Boni:
Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness. Sensors 17(4): 779 (2017)

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