"Noise Improvement of a-Si Microbolometers by the Post-Metal Annealing Process."

Jaesub Oh et al. (2021)

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DOI: 10.3390/S21206722

access: open

type: Journal Article

metadata version: 2021-12-15

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Jaesub Oh, Hyeong-sub Song, Jongcheol Park, Jong-Kwon Lee:
Noise Improvement of a-Si Microbolometers by the Post-Metal Annealing Process. Sensors 21(20): 6722 (2021)

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