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"The Fabrication and Evaluation of a Capacitive Pressure Sensor Using ..."
Hodaka Otsuka et al. (2023)
- Hodaka Otsuka, Takafumi Ninoseki, Chiemi Oka, Seiichi Hata, Junpei Sakurai
:
The Fabrication and Evaluation of a Capacitive Pressure Sensor Using Ru-Based Thin Film Metallic Glass with Structural Relaxation by Heat Treatment. Sensors 23(23): 9557 (2023)
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