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"Instability of Contact Resistance in MEMS and NEMS DC Switches under Low ..."

Haodong Qiu, Hong Wang, Feixiang Ke (2013)

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DOI: 10.3390/S131216360

access: open

type: Journal Article

metadata version: 2020-05-30

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Haodong Qiu, Hong Wang, Feixiang Ke:
Instability of Contact Resistance in MEMS and NEMS DC Switches under Low Force: the Role of Alien Films on the Contact Surface. Sensors 13(12): 16360-16371 (2013)

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