"Design, Fabrication, and Dynamic Analysis of a MEMS Ring Resonator ..."

Ahmad Rahbar Ranji et al. (2024)

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DOI: 10.3390/S24144499

access: open

type: Journal Article

metadata version: 2024-08-22

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Ahmad Rahbar Ranji, Gnanesh Nagesh, Fangyan Sun, Mohammed Jalal Ahamed:
Design, Fabrication, and Dynamic Analysis of a MEMS Ring Resonator Supported by Twin Circular Curve Beams. Sensors 24(14): 4499 (2024)

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