"Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine."

Arti Tibrewala et al. (2009)

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DOI: 10.3390/S90503228

access: open

type: Journal Article

metadata version: 2018-11-14

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  - https://dblp.org/rec/journals/sensors/TibrewalaHPJB09
Arti Tibrewala, Norbert Hofmann, Anurak Phataralaoha, Gerd Jäger, Stephanus Büttgenbach:
Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine. Sensors 9(5): 3228-3239 (2009)

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